{"id":4120,"date":"2025-03-27T09:53:11","date_gmt":"2025-03-27T08:53:11","guid":{"rendered":"https:\/\/web.infn.it\/TechTransfer\/portfolio_page\/semiconductor-doping-process\/"},"modified":"2026-01-13T14:26:33","modified_gmt":"2026-01-13T13:26:33","slug":"semiconductor-doping-process","status":"publish","type":"portfolio_page","link":"https:\/\/web.infn.it\/TechTransfer\/en\/portfolio_page\/semiconductor-doping-process\/","title":{"rendered":"Semiconductor doping process"},"content":{"rendered":"<div class=\"wpb-content-wrapper\"><p>[vc_row css_animation=&#8221;&#8221; row_type=&#8221;row&#8221; use_row_as_full_screen_section=&#8221;no&#8221; type=&#8221;full_width&#8221; angled_section=&#8221;no&#8221; text_align=&#8221;left&#8221; background_image_as_pattern=&#8221;without_pattern&#8221;][vc_column][vc_raw_html]W3dwc2VvX2JyZWFkY3J1bWJd[\/vc_raw_html][vc_empty_space][vc_column_text]<\/p>\n<h1 class=\"sc-3ef66e11-0 sc-3ef66e11-4 fXjQOR ccMxhY\">Semiconductor doping process<\/h1>\n<p>[\/vc_column_text][vc_empty_space][\/vc_column][\/vc_row][vc_row css_animation=&#8221;&#8221; row_type=&#8221;row&#8221; use_row_as_full_screen_section=&#8221;no&#8221; type=&#8221;full_width&#8221; angled_section=&#8221;no&#8221; text_align=&#8221;left&#8221; background_image_as_pattern=&#8221;without_pattern&#8221;][vc_column width=&#8221;2\/3&#8243;][vc_empty_space][vc_column_text]The patented procedure is able to produce high doping junctions in semiconductors through an innovative process, alternative to ion implantation.<\/p>\n<p>It is a cheap process, suitable for micro-\/nanoelectronics and high-precision sensing applications.[\/vc_column_text][vc_empty_space][vc_single_image image=&#8221;4121&#8243; img_size=&#8221;full&#8221; qode_css_animation=&#8221;&#8221;][vc_empty_space][vc_column_text]<\/p>\n<h3><span style=\"color: #20415c;\">How does it work?<\/span><\/h3>\n<p>[\/vc_column_text][vc_empty_space][vc_column_text]The current techniques for doping semiconductors are afflicted by various problems that have limited their use, for example in nanoelectronics applications. Ionic implantation and subsequent heat treatment (annealing), besides having a considerable impact on costs, does not always lend itself to production processes. <\/p>\n<p>This innovative process is instead able to create a high doping surface thanks to the application of\u202flaser melting\u202fto the sequence of deposits (protective film and source). While cooling after a laser pulsation, there is crystalline regrowth of the molten germanium and the transition to a coherent crystalline phase of the deposited protective film. This transformation makes it possible to control the thickness of the layer and the concentration of the dopant element in the contact, while protecting it from the atmosphere and limiting its diffusion outwards, through a cheaper process. A prototype of a hyper-pure germanium diode (HPGe) has been developed to apply this process over larger areas.[\/vc_column_text][vc_empty_space][vc_column_text]<\/p>\n<h3><span style=\"color: #20415c;\">Applications<\/span><\/h3>\n<p>[\/vc_column_text][vc_column_text]<\/p>\n<ul>\n<li>Hyper-pure germanium (HPGe) radiation detectors;<\/li>\n<li>Semiconductor-based particle and\/or radiation detectors;<\/li>\n<li>Microelectronics and nanoelectronics;<\/li>\n<li>Opto-electronic applications.<\/li>\n<\/ul>\n<p>[\/vc_column_text][vc_empty_space][vc_column_text]<\/p>\n<h3><span style=\"color: #20415c;\">Advantages<\/span><\/h3>\n<p>[\/vc_column_text][vc_column_text]<\/p>\n<ul>\n<li>Reduced costs compared to the ionic system;<\/li>\n<li>High electrical activation;<\/li>\n<li>It preserves the purity of the underlying material;<\/li>\n<li>Applicable to a large number of dopants, including those sensitive to atmosphere;<\/li>\n<li>Elimination of dopant\u202fout-diffusion;<\/li>\n<li>Possibility of varying dopant concentration and contact thickness;<\/li>\n<li>Possibility to create\u202fultra-shallow junctions.<\/li>\n<\/ul>\n<p>[\/vc_column_text][\/vc_column][vc_column width=&#8221;1\/4&#8243; css=&#8221;.vc_custom_1702567488600{margin-bottom: 50px !important;background-color: #042a48 !important;}&#8221; el_class=&#8221;.column_details_portfolio&#8221;][vc_column_text]<\/p>\n<h4><span style=\"color: #ffffff;\">ADDITIONAL DETAILS<\/span><\/h4>\n<p>[\/vc_column_text][vc_empty_space][vc_column_text]<\/p>\n<h5><span style=\"color: #8bc9e0;\"><strong>PATENT OWNERS<\/strong><\/span><\/h5>\n<p style=\"color: #fff; font-weight: bold;\">INFN and UNIPD<\/p>\n<p>[\/vc_column_text][vc_empty_space height=&#8221;21px&#8221;][vc_column_text]<\/p>\n<h5><span style=\"color: #8bc9e0;\"><strong>PRIORITY NUMBER<\/strong><\/span><\/h5>\n<p><strong><span style=\"color: #ffffff;\">IT 102020000008662<\/span><\/strong>[\/vc_column_text][vc_empty_space height=&#8221;21px&#8221;][vc_column_text]<\/p>\n<h5><span style=\"color: #8bc9e0;\"><strong>TECHNOLOGY SECTOR <\/strong><\/span><\/h5>\n<p><strong><span style=\"color: #ffffff;\">Semiconductors and electronics<\/span><\/strong>[\/vc_column_text][vc_empty_space height=&#8221;21px&#8221;][vc_column_text]<\/p>\n<h5><span style=\"color: #8bc9e0;\"><strong>TT CODE<\/strong><\/span><\/h5>\n<p><strong><span style=\"color: #ffffff;\">P_20.006<\/span><\/strong>[\/vc_column_text][vc_empty_space][vc_row_inner row_type=&#8221;row&#8221; type=&#8221;full_width&#8221; text_align=&#8221;left&#8221; css_animation=&#8221;&#8221;][vc_column_inner el_class=&#8221;riga_spazio_progetti&#8221;][\/vc_column_inner][\/vc_row_inner][vc_empty_space][vc_column_text]<\/p>\n<h5><span style=\"color: #8bc9e0;\"><strong>CONTACT US<\/strong><\/span><\/h5>\n<p><strong><span style=\"color: #ffffff;\">For more information about this technology, <\/span><a href=\"mailto:tto@lists.infn.it\"><span style=\"text-decoration: underline;\"><strong><span style=\"color: #ffffff; text-decoration: underline;\">WRITE TO US<\/span><\/strong><\/span><\/a><\/strong>[\/vc_column_text][vc_empty_space][\/vc_column][\/vc_row][vc_row css_animation=&#8221;&#8221; row_type=&#8221;row&#8221; use_row_as_full_screen_section=&#8221;no&#8221; type=&#8221;full_width&#8221; angled_section=&#8221;no&#8221; text_align=&#8221;left&#8221; background_image_as_pattern=&#8221;without_pattern&#8221;][vc_column][vc_empty_space height=&#8221;51px&#8221;][\/vc_column][\/vc_row]<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>[vc_row css_animation=&#8221;&#8221; row_type=&#8221;row&#8221; use_row_as_full_screen_section=&#8221;no&#8221; type=&#8221;full_width&#8221; angled_section=&#8221;no&#8221; text_align=&#8221;left&#8221; background_image_as_pattern=&#8221;without_pattern&#8221;][vc_column][vc_raw_html]W3dwc2VvX2JyZWFkY3J1bWJd[\/vc_raw_html][vc_empty_space][vc_column_text] Semiconductor doping process [\/vc_column_text][vc_empty_space][\/vc_column][\/vc_row][vc_row css_animation=&#8221;&#8221; row_type=&#8221;row&#8221; use_row_as_full_screen_section=&#8221;no&#8221; type=&#8221;full_width&#8221; angled_section=&#8221;no&#8221; text_align=&#8221;left&#8221; background_image_as_pattern=&#8221;without_pattern&#8221;][vc_column width=&#8221;2\/3&#8243;][vc_empty_space][vc_column_text]The patented procedure is able to produce high doping junctions in semiconductors through an innovative process, alternative to ion implantation. It is a cheap process, suitable&#8230;<\/p>\n","protected":false},"author":6,"featured_media":4121,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","portfolio_category":[253,252],"portfolio_tag":[],"class_list":["post-4120","portfolio_page","type-portfolio_page","status-publish","has-post-thumbnail","hentry","portfolio_category-electronics","portfolio_category-patents"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Semiconductor doping process - TechTransfer INFN<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/web.infn.it\/TechTransfer\/en\/portfolio_page\/semiconductor-doping-process\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Semiconductor doping process - TechTransfer INFN\" \/>\n<meta property=\"og:description\" content=\"[vc_row css_animation=&#8221;&#8221; row_type=&#8221;row&#8221; use_row_as_full_screen_section=&#8221;no&#8221; type=&#8221;full_width&#8221; angled_section=&#8221;no&#8221; text_align=&#8221;left&#8221; background_image_as_pattern=&#8221;without_pattern&#8221;][vc_column][vc_raw_html]W3dwc2VvX2JyZWFkY3J1bWJd[\/vc_raw_html][vc_empty_space][vc_column_text] Semiconductor doping process [\/vc_column_text][vc_empty_space][\/vc_column][\/vc_row][vc_row css_animation=&#8221;&#8221; row_type=&#8221;row&#8221; use_row_as_full_screen_section=&#8221;no&#8221; type=&#8221;full_width&#8221; angled_section=&#8221;no&#8221; text_align=&#8221;left&#8221; background_image_as_pattern=&#8221;without_pattern&#8221;][vc_column width=&#8221;2\/3&#8243;][vc_empty_space][vc_column_text]The patented procedure is able to produce high doping junctions in semiconductors through an innovative process, alternative to ion implantation. 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