Charged particle sensor obtained by combining RSD sensor and CMOS process

The technology refers to the field of charged particle detection by means of solid-state sensors, and to the high-resolution tracking in space and time of charged particles carried out with a sensor obtained by combining RSD sensor and CMOS process.

How does it work?

This invention demonstrates the possibility of making monolithic sensors based on the RSD sensor reading principle, using an industry-standard CMOS process. Thanks to this technology, it is possible to achieve high granularity tracking with excellent time performance, with clear advantages in terms of economic competitiveness and production scalability.

The invention also introduces an innovation in the manufacturing process of the CMOS integrated devices, making it possible to realise an advanced monolithic sensor based on the internal multiplication mechanism (LGAD), integrated with an RSD readout system.

The device described is technically a monolithic RSD: a particle detector that combines the benefits of monolithic integration in CMOS technology with the high performance of the RSD sensors.

Applications

• Quality control in the food industry and/or environments with possible radiation sources;
• Sectors such as airport security;
• Medical diagnostic imaging;
• Electronics industry for space use.

Advantages

• Very high spatial resolution and excellent timing resolution;
• Replacement of the existing particle tracers in high-energy physics;
• Large-scale and low-cost production possible.